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Materials aspects in microsystem technologies : proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998 /

Bibliographic Details
Corporate Authors: Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS Strasbourg, France, European Materials Research Society, E-MRS Spring Conference
Other Authors: Barbier, D. (Daniel)
Format: Conference Proceeding Book
Language:English
Published: Amsterdam ; Oxford : Elsevier, 1999.
Series:European Materials Research Society symposia proceedings ; v. 83.
Subjects:
Detectors > Congresses.
Microactuators > Congresses.
Microelectronics > Congresses.
Microelectromechanical systems > Congresses.
Description
Item Description:Reprinted from: Sensors and actuators, volume 74, number 1-3, 1999.
Physical Description:257 pages : illustrations ; 29 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0080436110