Materials aspects in microsystem technologies : proceedings of Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS 1998 Spring Conference, Strasbourg, France, June 16-19, 1998 /

Bibliographic Details
Corporate Authors:	Symposium H on Materials Aspects in Microsystem Technologies of the E-MRS Strasbourg, France, European Materials Research Society, E-MRS Spring Conference
Other Authors:	Barbier, D. (Daniel)
Format:	Conference Proceeding Book
Language:	English
Published:	Amsterdam ; Oxford : Elsevier, 1999.
Series:	European Materials Research Society symposia proceedings ; v. 83.
Subjects:	Detectors > Congresses. Microactuators > Congresses. Microelectronics > Congresses. Microelectromechanical systems > Congresses.

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