Mechanical microsensors /

Bibliographic Details
Main Author:	Elwenspoek, M. (Miko), 1948-
Other Authors:	Wiegerink, Remco J., 1964-
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, [2001]
Series:	Microtechnology and MEMS.
Subjects:	Detectors > Design and construction. Microelectromechanical systems > Design and construction. Transducers. Silicon. Micromachining.

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