MEMS and MOEMS : technology and applications /

Bibliographic Details

Other Authors:	Rai-Choudhury, P.
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE Press, [2000]
Series:	SPIE monograph ; PM85.
Subjects:	Microelectromechanical systems. Optoelectronic devices.