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Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Bibliographic Details
Corporate Authors: National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, NetLibrary, Inc
Format: eBook
Language:English
Published: Washington, D.C. : National Academy Press, 1992.
Subjects:
Microelectronics industry.
Molecular beams > Industrial applications.
Microelectronics > Materials.
Plasma-enhanced chemical vapor deposition > Industrial applications.
Electronic books.
Online Access:Connect to the full text of this electronic book
Description
Item Description:"NMAB-461."
Electronic resource.
Physical Description:xii, 89 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references.
ISBN:0585149453 (electronic bk.) :