Beam technologies for integrated processing : report of the Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.

Bibliographic Details
Corporate Authors:	National Research Council (U.S.). Committee on Beam Technologies: Opportunities in Attaining Fully-Integrated Processing Systems, NetLibrary, Inc
Format:	eBook
Language:	English
Published:	Washington, D.C. : National Academy Press, 1992.
Subjects:	Microelectronics industry. Molecular beams > Industrial applications. Microelectronics > Materials. Plasma-enhanced chemical vapor deposition > Industrial applications. Electronic books.
Online Access:	Connect to the full text of this electronic book

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