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Structure and electronic properties of ultrathin dielectric films on silicon and related structures /

Bibliographic Details
Other Authors: Buchanan, D. A.
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [2000]
Series:Materials Research Society symposia proceedings ; v. 592.
Subjects:
Silicon-on-insulator technology > Congresses.
Dielectric films > Congresses.

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Call Number: QC585.75.S55 S76 2000
 
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QC585.75.S55 S76 2000 Available