Process control and diagnostics : 18-19 September 2000, Santa Clara, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization), Electrochemical Society, American Vacuum Society
Other Authors:	Miller, Michael L., Ashtiani, Kaihan A.
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [2000]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4182.
Subjects:	Process control > Congresses. Manufacturing processes > Quality control > Congresses. Optical detectors > Industrial applications > Congresses. Lasers > Industrial applications > Congresses.

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