Micromachining technology for micro-optics : 20 September 2000, Santa Clara, USA /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, Solid State Technology (Organization), Sandia National Laboratories
Other Authors:	Lee, S. H. (Sing H.), 1939-, Johnson, Eric Gunnar, 1936-
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [2000]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4179.
Subjects:	Integrated optics > Congresses. Optoelectronic devices > Industrial applications > Congresses. Miniature electronic equipment > Industrial applications > Congresses. Microelectromechanical systems > Congresses.

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