Micromachining and microfabrication process technology VI : 18-20 September 2000, Santa Clara, USA /
| Corporate Authors: | , , , |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[2000]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 4174. |
| Subjects: | |
| Online Access: | https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/4174.toc?SSO= |
Internet
https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/4174.toc?SSO=Remote Storage
| Call Number: |
QC176.8.M25 .M425 2000 |
|
|---|---|---|
| Call Number | Status | Get It |
| QC176.8.M25 .M425 2000 | Available | |