Optical metrology roadmap for the semiconductor, optical, and data storage industries : 30-31 July 2000, San Diego, USA /
| Corporate Author: | |
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| Other Authors: | , , |
| Format: | Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[2000]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 4099. |
| Subjects: |
| Physical Description: | ix, 328 pages : illustrations ; 28 cm. |
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| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819437441 |