Optical metrology roadmap for the semiconductor, optical, and data storage industries : 30-31 July 2000, San Diego, USA /

Bibliographic Details
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Al-Jumaily, Ghanim A., Duparré, Angela, Singh, Bhanwar
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [2000]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 4099.
Subjects:	Optical measurements > Industrial applications > Congresses. Surfaces (Technology) > Measurement > Congresses. Optoelectronic devices > Industrial applications > Congresses. Information retrieval > Technological innovations > Congresses.

Remote Storage