APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Al-Jumaily, G. A., Duparré, A., & Singh, B. (2000). Optical metrology roadmap for the semiconductor, optical, and data storage industries: 30-31 July 2000, San Diego, USA. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Ghanim A. Al-Jumaily, Angela Duparré, and Bhanwar Singh. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries: 30-31 July 2000, San Diego, USA. Bellingham, Wash., USA: SPIE, 2000.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. Optical Metrology Roadmap for the Semiconductor, Optical, and Data Storage Industries: 30-31 July 2000, San Diego, USA. SPIE, 2000.