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Micro-opto-electro-mechanical systems : 22-23 May 2000, Glasgow, Scotland, United Kingdom /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, European Optical Society, Institution of Electrical Engineers, Institution of Mechanical Engineers (Great Britain)
Other Authors: Syms, R. R. A.
Format: Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2000]
Series:Europto series.
Proceedings of SPIE--the International Society for Optical Engineering ; v. 4075.
Subjects:
Microelectromechanical systems > Congresses.
Optoelectronic devices > Congresses.
Microfabrication > Congresses.

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Call Number: TK7875 .M53 2000
 
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TK7875 .M53 2000 Available