Cover Image

Sub-half-micron lithography for ULSIs /

Bibliographic Details
Other Authors: Suzuki, Katsumi, 1950-, Matsui, Shinji, Ochiai, Yukinori, 1955-
Format: Book
Language:English
Published: Cambridge ; New York : Cambridge University Press, 2000.
Subjects:
Integrated circuits > Ultra large scale integration > Design and construction.
Microlithography.
Printed circuits > Design and construction.
Description
Physical Description:xvii, 323 pages : illustrations ; 26 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0521570808