Sub-half-micron lithography for ULSIs /

Bibliographic Details
Other Authors:	Suzuki, Katsumi, 1950-, Matsui, Shinji, Ochiai, Yukinori, 1955-
Format:	Book
Language:	English
Published:	Cambridge ; New York : Cambridge University Press, 2000.
Subjects:	Integrated circuits > Ultra large scale integration > Design and construction. Microlithography. Printed circuits > Design and construction.

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