Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland, March 1998 /

Bibliographic Details
Corporate Author:	International Conference on Characterization and Metrology for ULSI Technology
Other Authors:	Seiler, David G.
Format:	Conference Proceeding Software eBook
Language:	English
Published:	Woodbury, NY : American Institute of Physics, [1998]
Series:	AIP conference proceedings ; no. 449.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software.

Description
Item Description:	"The 1998 International Conference on Characterization and Metrology for ULSI Technology was held at the National Institute of Standards and Technology from March 23 to March 27, 1998"--Pref. Accompanying computer disc contains full text from the book.
Physical Description:	xv, 960 pages : illustrations ; 28 cm. + 1 CD-ROM (4 3/4 in.).
Format:	System requirements for accompanying computer disc: IBM PC or compatible; hard disk with at least 4 MB free; at least 4 MB RAM; Windows 95 or Windows 3.1.; Acrobat Reader. System requirements for Macintosh computer disc: Macintosh, Power Mac, or compatible; hard disk with 4 MB free; 2 MB RAM; System 7 or later; Acrobat Reader. System requirements for Unix computer disc: SUN Sparcstation; hard disk with 8 MB free; 32 MB RAM; SunOS version 4.1.3 or later, Solaris 2.3, 2.4. or 2.4 or later; Acrobat Reader.
Bibliography:	Includes bibliographical references and indexes.
ISBN:	1563967537 (set) 1563968681 (CD-ROM) 1563968673 (print)
ISSN:	0094-243x ;