Characterization and metrology for ULSI technology : 1998 international conference, Gaithersburg, Maryland, March 1998 /

Bibliographic Details
Corporate Author:	International Conference on Characterization and Metrology for ULSI Technology
Other Authors:	Seiler, David G.
Format:	Conference Proceeding Software eBook
Language:	English
Published:	Woodbury, NY : American Institute of Physics, [1998]
Series:	AIP conference proceedings ; no. 449.
Subjects:	Integrated circuits > Ultra large scale integration > Congresses. Integrated circuits > Ultra large scale integration > Congresses > Software.

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