APA (7th ed.) Citation

International Conference on Characterization and Metrology for ULSI Technology & Seiler, D. G. (1998). Characterization and metrology for ULSI technology: 1998 international conference, Gaithersburg, Maryland, March 1998. American Institute of Physics.

Chicago Style (17th ed.) Citation

International Conference on Characterization and Metrology for ULSI Technology and David G. Seiler. Characterization and Metrology for ULSI Technology: 1998 International Conference, Gaithersburg, Maryland, March 1998. Woodbury, NY: American Institute of Physics, 1998.

MLA (9th ed.) Citation

International Conference on Characterization and Metrology for ULSI Technology and David G. Seiler. Characterization and Metrology for ULSI Technology: 1998 International Conference, Gaithersburg, Maryland, March 1998. American Institute of Physics, 1998.