Cover Image

Optical microlithography XIII : 1-3 March 2000, Santa Clara, [California], USA /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International, SEMATECH (Organization)
Other Authors: Progler, Christopher J.
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 4000.
Subjects:
Microlithography > Congresses.
Integrated circuits > Masks > Congresses.
X-ray lithography > Congresses.
Manufacturing processes > Congresses.
Description
Physical Description:2 volumes (xviii, 1622 pages) : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819436186