Metal impurities in silicon-device fabrication /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
[2000]
|
| Edition: | 2nd, rev. ed. |
| Series: | Springer series in materials science ;
v. 24. |
| Subjects: |
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