Metal impurities in silicon-device fabrication /

Bibliographic Details
Main Author:	Graff, Klaus, 1931-
Format:	Book
Language:	English
Published:	Berlin ; New York : Springer, [2000]
Edition:	2nd, rev. ed.
Series:	Springer series in materials science ; v. 24.
Subjects:	Semiconductors > Defects. Silicon > Inclusions. Silicon > Defects. Contamination (Technology)

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