Metal impurities in silicon-device fabrication /
| Main Author: | |
|---|---|
| Format: | Book |
| Language: | English |
| Published: |
Berlin ; New York :
Springer,
[2000]
|
| Edition: | 2nd, rev. ed. |
| Series: | Springer series in materials science ;
v. 24. |
| Subjects: |
| Physical Description: | xv, 268 pages : illustrations ; 24 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 3540642137 (hardcover : alk. paper) |