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Materials science of microelectromechanical systems (MEMS) devices /

Bibliographic Details
Other Authors: Heuer, A. H. (Arthur Harold), 1936-, Jacobs, S. Joshua
Format: Book
Language:English
Published: Warrendale, Pa. : Materials Research Society, [1999]
Series:Materials Research Society symposia proceedings ; v. 546.
Subjects:
Microelectromechanical systems > Congresses.
Microelectronics > Materials > Congresses.
Description
Physical Description:ix, 246 pages : illustrations ; 24 cm.
Bibliography:Includes bibliographical references and indexes.
ISBN:1558994521