Materials science of microelectromechanical systems (MEMS) devices /

Bibliographic Details
Other Authors:	Heuer, A. H. (Arthur Harold), 1936-, Jacobs, S. Joshua
Format:	Book
Language:	English
Published:	Warrendale, Pa. : Materials Research Society, [1999]
Series:	Materials Research Society symposia proceedings ; v. 546.
Subjects:	Microelectromechanical systems > Congresses. Microelectronics > Materials > Congresses.

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