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16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany /

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Bibliographic Details
Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents Munich, Germany, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Institut für Mikrostrukturtechnik, Society of Photo-optical Instrumentation Engineers
Other Authors: Behringer, Uwe
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3996.
Subjects:
Integrated circuits > Masks > Congresses.
Microlithography > Congresses.
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Published 2002
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Published 2001
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Published 1999
Conference Proceeding Book
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