Cover Image

16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany /

Show other versions (3)
Bibliographic Details
Corporate Authors: European Conference on Mask Technology for Integrated Circuits and Microcomponents Munich, Germany, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Institut für Mikrostrukturtechnik, Society of Photo-optical Instrumentation Engineers
Other Authors: Behringer, Uwe
Format: Conference Proceeding Book
Language:English
Published: Bellingham, Wash., USA : SPIE, [2000]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3996.
Subjects:
Integrated circuits > Masks > Congresses.
Microlithography > Congresses.

Remote Storage

Holdings details from Remote Storage
Call Number: TK7872.M3 E97 1999
 
Call Number Status Get It
TK7872.M3 E97 1999 Available