16th European Conference on Mask Technology for Integrated Circuits and Microcomponents : 15-16 November 1999, Munich, Germany /
| Corporate Authors: | , , , |
|---|---|
| Other Authors: | |
| Format: | Conference Proceeding Book |
| Language: | English |
| Published: |
Bellingham, Wash., USA :
SPIE,
[2000]
|
| Series: | Proceedings of SPIE--the International Society for Optical Engineering ;
v. 3996. |
| Subjects: |
| Item Description: | At head of title: Proceedings. |
|---|---|
| Physical Description: | xii, 252 pages : illustrations ; 28 cm. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 0819436143 |