APA (7th ed.) Citation

European Conference on Mask Technology for Integrated Circuits and Microcomponents Munich, Germany, VDE/VDI-Gesellschaft für Mikroelektronik, Mikro- und Feinwerktechnik, Institut für Mikrostrukturtechnik, Society of Photo-optical Instrumentation Engineers, & Behringer, U. (2000). 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 15-16 November 1999, Munich, Germany. SPIE.

Chicago Style (17th ed.) Citation

European Conference on Mask Technology for Integrated Circuits and Microcomponents Munich, Germany, Mikro- und Feinwerktechnik VDE/VDI-Gesellschaft für Mikroelektronik, Institut für Mikrostrukturtechnik, Society of Photo-optical Instrumentation Engineers, and Uwe Behringer. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 15-16 November 1999, Munich, Germany. Bellingham, Wash., USA: SPIE, 2000.

MLA (9th ed.) Citation

European Conference on Mask Technology for Integrated Circuits and Microcomponents Munich, Germany, et al. 16th European Conference on Mask Technology for Integrated Circuits and Microcomponents: 15-16 November 1999, Munich, Germany. SPIE, 2000.