Microengineering technology for space systems /

Bibliographic Details
Corporate Authors:	Aerospace Corporation, Aerospace Press
Other Authors:	Helvajian, Henry
Format:	Book
Language:	English
Published:	Los Angeles, CA ; Aerospace Corp, [publisher not identified] ; [1997]
Series:	Monograph (Aerospace Press) ; 97-02.
Subjects:	Integrated circuits > Very large scale integration > Design and construction. Microlithography. Nanostructured materials.

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