Microscale heat conduction in integrated circuits and their constituent films /

Bibliographic Details
Main Author:	Ju, Y. Sungtaek, 1970-
Other Authors:	Goodson, Kenneth E., 1967-
Format:	Book
Language:	English
Published:	Boston : Kluwer Academic, [1999]
Series:	Microsystems (Series) ; 6.
Subjects:	Thin film transistors. Semiconductors > Cooling. Heat > Transmission. Silicon-on-insulator technology.

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