Indo-Russian Workshop on Micromechanical Systems : 2-4 February 1999, New Delhi, India /

Bibliographic Details
Corporate Authors:	Indo-Russian Workshop on Micromechanical Systems New Delhi, India, Society of Photo-optical Instrumentation Engineers, Solid State Physics Laboratory (India), Defence Research & Development Organisation (India)
Other Authors:	Prokhorov, A. M. (Aleksandr Mikhaĭlovich), 1916-, Ramamurthy, V. S., Pustovoy, Vladimir, Jain, Vinoy K.
Format:	Conference Proceeding Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3903.
Subjects:	Optoelectronic devices > Design and construction > Congresses. Optoelectronic devices > Materials > Congresses. Microelectromechanical systems > Design and construction > Congresses.

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