Device and process technologies for MEMS and microelectronics : 27-29 October 1999, Royal Pines Resort, Queensland, Australia /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Institution of Radio and Electronics Engineers, Australia, Queensland. Government State Development, Griffith University Microelectronics Engineering Society
Other Authors:	Chau, Kevin, Dimitrijev, Sima, 1958-
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3892.
Subjects:	Microelectromechanical systems > Congresses. Photon detectors > Design and construction > Congresses. Photomechanical processes > Congresses. Photolithography > Congresses.

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