Micromachined devices and components V : 20-21 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization)
Other Authors:	French, Patrick J., Peeters, Eric
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3876.
Subjects:	Electromechanical devices > Congresses. Micromechanics > Congresses. Micromachining > Congresses.

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