Materials and device characterization in micromachining II : 20-21 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization)
Other Authors:	Vladimirsky, Yuli, Friedrich, Craig
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3875.
Subjects:	Micromachining > Congresses. Electromechanical devices > Congresses. Micromechanics > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/3875.toc?SSO=1

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