Development of porous silicon field emitter arrays for vacuum microelectronic applications /

The electrical characteristics of silicon field y Microfilm Inc. emitter array (FEA), oxidation sharpened Si FEA porous silicon (PS) FEA, and sinicized PS FEA were studied. PS layers were formed by either anodization or stain etching. The modified surface became roughened and had a high density of n...

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Bibliographic Details

Main Author:	Kim, Hong-Ryong, 1969-
Format:	Thesis Book
Language:	English
Published:	[Place of publication not identified] : [publisher not identified] ; 1998.
Subjects:	Major electrical engineering.
Online Access:	http://proxy.library.tamu.edu/login?url=http://proquest.umi.com/pqdweb?did=733050271&sid=1&Fmt=2&clientId=2945&RQT=309&VName=PQD