Microsystem metrology and inspection : 15-16 June 1999, Munich, Germany /

Bibliographic Details
Corporate Authors:	European Optical Society, Society of Photo-optical Instrumentation Engineers
Other Authors:	Gorecki, Christophe
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1999]
Series:	Europto series. Proceedings of SPIE--the International Society for Optical Engineering ; v. 3825.
Subjects:	Microelectronics > Congresses. Microelectromechanical systems > Congresses. Optical instruments > Industrial applications > Congresses. Interferometry > Congresses. Measurement > Congresses.

Description
Physical Description:	v, 186 pages : illustrations ; 28 cm.
Bibliography:	Includes bibliographical references and index.
ISBN:	081943311X