Microsystem metrology and inspection : 15-16 June 1999, Munich, Germany /

Bibliographic Details
Corporate Authors:	European Optical Society, Society of Photo-optical Instrumentation Engineers
Other Authors:	Gorecki, Christophe
Format:	Book
Language:	English
Published:	Bellingham, Wash., USA : SPIE, [1999]
Series:	Europto series. Proceedings of SPIE--the International Society for Optical Engineering ; v. 3825.
Subjects:	Microelectronics > Congresses. Microelectromechanical systems > Congresses. Optical instruments > Industrial applications > Congresses. Interferometry > Congresses. Measurement > Congresses.

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