European Optical Society, Society of Photo-optical Instrumentation Engineers, & Gorecki, C. (1999). Microsystem metrology and inspection: 15-16 June 1999, Munich, Germany. SPIE.
Chicago Style (17th ed.) CitationEuropean Optical Society, Society of Photo-optical Instrumentation Engineers, and Christophe Gorecki. Microsystem Metrology and Inspection: 15-16 June 1999, Munich, Germany. Bellingham, Wash., USA: SPIE, 1999.
MLA (9th ed.) CitationEuropean Optical Society, et al. Microsystem Metrology and Inspection: 15-16 June 1999, Munich, Germany. SPIE, 1999.
Warning: These citations may not always be 100% accurate.