MEMS reliability for critical and space applications : 21-22 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Solid State Technology (Organization)
Other Authors:	Lawton, Russell A.
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3880.
Subjects:	Microelectromechanical systems > Congresses.
Online Access:	https://www.spiedigitallibrary.org/conference-proceedings-of-SPIE/3880.toc

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