Cover Image

Micromachining and microfabrication process technology V : 20-22 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors: Smith, James H., Karam, Jean-Michel
Format: Book
Language:English
Published: Bellingham, Washington : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3874.
Subjects:
Micromachining > Congresses.
Microfabrication > Congresses.
Electromechanical devices > Design and construction > Congresses.
Description
Physical Description:x, 434 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:081943471X
9780819434715