Micromachining and microfabrication process technology V : 20-22 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Semiconductor Equipment and Materials International
Other Authors:	Smith, James H., Karam, Jean-Michel
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3874.
Subjects:	Micromachining > Congresses. Microfabrication > Congresses. Electromechanical devices > Design and construction > Congresses.

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