Cover Image

In-line methods and monitors for process and yield improvement : 22-23 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Electrochemical Society
Other Authors: Ajuria, Sergio, Jakubczak, Jerome F.
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3884.
Subjects:
Semiconductors > Design and construction > Congresses.
Integrated circuits > Design and construction > Congresses.
Optical pattern recognition > Industrial applications > Congresses.
Manufacturing processes > Congresses.
Description
Physical Description:ix, 334 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819434817