In-line methods and monitors for process and yield improvement : 22-23 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Electrochemical Society
Other Authors:	Ajuria, Sergio, Jakubczak, Jerome F.
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3884.
Subjects:	Semiconductors > Design and construction > Congresses. Integrated circuits > Design and construction > Congresses. Optical pattern recognition > Industrial applications > Congresses. Manufacturing processes > Congresses.

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