APA (7th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Electrochemical Society, Ajuria, S., & Jakubczak, J. F. (1999). In-line methods and monitors for process and yield improvement: 22-23 September 1999, Santa Clara, California. SPIE.

Chicago Style (17th ed.) Citation

Society of Photo-optical Instrumentation Engineers, Electrochemical Society, Sergio Ajuria, and Jerome F. Jakubczak. In-line Methods and Monitors for Process and Yield Improvement: 22-23 September 1999, Santa Clara, California. Bellingham, Wash.: SPIE, 1999.

MLA (9th ed.) Citation

Society of Photo-optical Instrumentation Engineers, et al. In-line Methods and Monitors for Process and Yield Improvement: 22-23 September 1999, Santa Clara, California. SPIE, 1999.