Cover Image

Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors: Society of Photo-optical Instrumentation Engineers, Electrochemical Society
Other Authors: Toprac, Anthony J. (Anthony John), 1955-, Dang, Kim
Format: Book
Language:English
Published: Bellingham, Wash. : SPIE, [1999]
Series:Proceedings of SPIE--the International Society for Optical Engineering ; v. 3882.
Subjects:
Integrated circuits > Design and construction > Congresses.
Plasma etching > Congresses.
Metallizing > Congresses.
Dielectric films > Congresses.
Process control > Congresses.
Description
Physical Description:vii, 310 pages : illustrations ; 28 cm.
Bibliography:Includes bibliographical references and index.
ISBN:0819434795