Process, equipment, and materials control in integrated circuit manufacturing V : 22-23 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Electrochemical Society
Other Authors:	Toprac, Anthony J. (Anthony John), 1955-, Dang, Kim
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3882.
Subjects:	Integrated circuits > Design and construction > Congresses. Plasma etching > Congresses. Metallizing > Congresses. Dielectric films > Congresses. Process control > Congresses.

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