Microelectronic device technology III : 22-23 September 1999, Santa Clara, California /

Bibliographic Details
Corporate Authors:	Society of Photo-optical Instrumentation Engineers, Electrochemical Society
Other Authors:	Burnett, David, Tsuchiya, Toshiaki
Format:	Book
Language:	English
Published:	Bellingham, Wash. : SPIE, [1999]
Series:	Proceedings of SPIE--the International Society for Optical Engineering ; v. 3881.
Subjects:	Semiconductors > Congresses. Semiconductors > Design and construction > Congresses. Microelectronics > Congresses.

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