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Micromachined ultrasound-based proximity sensors /

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Bibliographic Details
Main Author: Hornung, Mark R., 1967-
Other Authors: Brand, Oliver, 1964-
Format: Book
Language:English
Published: Boston : Kluwer Academic Publishers, [1999]
Series:Microsystems (Series) ; 4.
Subjects:
Proximity detectors.
Ultrasonic transducers.
Microelectromechanical systems.
Description
Physical Description:xii, 120 pages : illustrations ; 25 cm.
Bibliography:Includes bibliographical references (pages [111]-118) and index.
ISBN:079238508X (alk. paper)