Micromachined ultrasound-based proximity sensors /

Bibliographic Details

Main Author:	Hornung, Mark R., 1967-
Other Authors:	Brand, Oliver, 1964-
Format:	Book
Language:	English
Published:	Boston : Kluwer Academic Publishers, [1999]
Series:	Microsystems (Series) ; 4.
Subjects:	Proximity detectors. Ultrasonic transducers. Microelectromechanical systems.